A. 物質の表面に薄膜を形成する蒸着法のひとつで、気相中で物質の表面に物理的手法により目的とする物質の薄膜を堆積する方法です。
参考URL:https://ja.wikipedia.org/wiki/%E7%89%A9%E7%90%86%E6%B0%97%E7%9B%B8%E6%88%90%E9%95%B7
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A. 物質の表面に薄膜を形成する蒸着法のひとつで、気相中で物質の表面に物理的手法により目的とする物質の薄膜を堆積する方法です。
参考URL:https://ja.wikipedia.org/wiki/%E7%89%A9%E7%90%86%E6%B0%97%E7%9B%B8%E6%88%90%E9%95%B7
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